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Products
       
   

Micro/ Nanostencils

Specification for chip stencils:

  Micro Nano
Size
10 x 10 mm
# membranes 3 x 3 4 x 4
Membrane size [mm]
1x1
0.5x0.5
Material low stress SiN
Smallest aperture 2Ám 100nm
Membrane thickness [nm] 500 100

Specification for wafer stencils:

  Micro Nano
Wafer size [mm]
100
   

   

 

Stencil tools

Fixing tools allow positioning and clamping the stencil to your substrate in a safe and clean way.

  • Chip fixing tool, for rapid prototyping: CFT-10
  • Wafer fixing tool, for high-throughput nanopatterning: WFT-100
  • Glass slide fixing tool (for life-science applications , biology, nanobiotechnology): FFT-Bio
Fixing tools simplify the use of our micro/ nanostencils and make the stencil lithography process reliable.
 
   

 

Dynamic Stencil Tool (DST)

Moving the shadow mask during deposition for step-and-repeat or free motion patterning.

Compatible with most / standard thin film deposition equipment.

 

 
   
 
   

A: same pattern stitching, B: complementary pattern stitching, C: free motion direct writing

 
   
 
           
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